JPH0474727B2 - - Google Patents

Info

Publication number
JPH0474727B2
JPH0474727B2 JP62229293A JP22929387A JPH0474727B2 JP H0474727 B2 JPH0474727 B2 JP H0474727B2 JP 62229293 A JP62229293 A JP 62229293A JP 22929387 A JP22929387 A JP 22929387A JP H0474727 B2 JPH0474727 B2 JP H0474727B2
Authority
JP
Japan
Prior art keywords
negative pressure
nozzle
pressure
port
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62229293A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6472214A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP22929387A priority Critical patent/JPS6472214A/ja
Publication of JPS6472214A publication Critical patent/JPS6472214A/ja
Publication of JPH0474727B2 publication Critical patent/JPH0474727B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)
JP22929387A 1987-09-12 1987-09-12 Vacuum pressure regulator Granted JPS6472214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22929387A JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22929387A JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Publications (2)

Publication Number Publication Date
JPS6472214A JPS6472214A (en) 1989-03-17
JPH0474727B2 true JPH0474727B2 (en]) 1992-11-27

Family

ID=16889860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22929387A Granted JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Country Status (1)

Country Link
JP (1) JPS6472214A (en])

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945519A (ja) * 1982-09-09 1984-03-14 Orion Mach Co Ltd 電子式真空圧調整装置
JPS6024415A (ja) * 1983-07-20 1985-02-07 Shimadzu Corp 電−空変換器
JPS6116472U (ja) * 1984-07-03 1986-01-30 株式会社山武 弁
JPH0353294Y2 (en]) * 1984-12-14 1991-11-21
JPS61104872U (en]) * 1984-12-17 1986-07-03

Also Published As

Publication number Publication date
JPS6472214A (en) 1989-03-17

Similar Documents

Publication Publication Date Title
US4722360A (en) Fluid regulator
JP3952321B2 (ja) サックバックバルブ
JP3586075B2 (ja) 圧力式流量制御装置
JPWO2019107215A1 (ja) 流量制御装置
US6520479B1 (en) Flow rate control valve
US5370152A (en) I/P converters
JPH10267147A (ja) サックバックバルブ
WO2011040409A1 (ja) 流量測定機構及びマスフローコントローラ
CN111133239A (zh) 阀装置、流量调整方法、流体控制装置、流量控制方法、半导体制造装置和半导体制造方法
US10013002B2 (en) Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same
KR102304548B1 (ko) 밸브장치 및 그 제어장치를 사용한 제어방법, 유체 제어장치 및 반도체 제조장치
JPH0474727B2 (en])
JPH0326302B2 (en])
JP3971840B2 (ja) 圧力式流量制御装置
JPH07293738A (ja) 調整弁
JPS63275801A (ja) 電気信号−流体圧レギュレ−タ
JPH0416643B2 (en])
JPH11265217A (ja) 圧力式流量制御装置
JPS61170614A (ja) 電気信号−空気圧変換ユニツト
JP2594070B2 (ja) 自動開閉制御装置
JPH0431336B2 (en])
JPH054552B2 (en])
JPH0665882B2 (ja) 電気信号−空気圧変換ユニット
JP4317739B2 (ja) 絶対圧レギュレータ及び定圧レギュレータ
JP2003122437A (ja) 流体圧力調整装置